Profilometer

Manufacture: 2D surface Profiler KLA Tencor D-500

Capabilities

• High-resolution 2D profiling with profile stitching capability
• 140 mm sample stage supports scan lengths up to 30 mm
• Vertical range of 1200 μm and low force sensor technology at 0.03 mg
• High resolution 5 MP color camera with 4x digital zoom

• KLA Tencor Alpha-Step D-500
  • High-resolution 2D profiling with profile stitching capability
  • 140 mm sample stage supports scan lengths up to 30 mm in a single scan and up to 80 mm utilizing the stitching function
  • Vertical range of 1200 μm and low force sensor technology at 0.03 mg
  • High-resolution 5 MP color camera with 4x digital zoom