Magnetron Sputtering System
Manufacture: Torr CRC602-2G2
Capabilities
- Two 2” cathodes with DC and RF power supplies
- 4.5” diameter substrate stage
- 600 W DC power supply
- 300 W RF package with auto matching network controller
- Two 2” cathodes with DC and RF power supplies
- 4.5” diameter substrate stage
- 600 W DC power supply
- 300 W RF package with auto matching network controller
- Programmable mass flow controller
- TwisTorr 80 l/sec turbo pump