Thin Film Measurement Profilm
Manufacture: Filmetrics Profilm3D
Capabilities
- Thickness Range, WLI 50nm - 10mm
- Sample Reflectance Range 0.05% - 100%
- Camera 2592 x 1944 (5 megapixels)
- State-of-the-art white light interferometry (WLI) optical profiler to measure surface profiles and roughness down to 0.05 µm
- Thickness range: 50 nm–10 mm
- Sample reflectance range: 0.05%–100%
- 10x Nikon Mirau interferometric objective lens
- Field-of-view: 2.0 × 1.7 mm
- Spatial sampling: 0.88 µm
- Autofocus
- 100 mm × 100 mm auto stage